本文へスキップします。

【全:英】ロゴ

【全:英】H1テキスト

Bonding Microscopic Worlds, Creating Innovative Futures

  • M
  • L

【全:英】サイト内検索

【全:英】ヘッタリンク

H1

Die Bonder (STC-800)

Q&A:検索

Category
KeyWord

If results do not appear, please search with another keyword again.

装置編

Equipment

Problems at machine power-ON

The equipment does not start.

Possible causes

Are the cables and connectors connected correctly?

Actions to take

Check the power supply and whether any cables or connectors are disconnected, then restart the equipment.
The operation panel does not work.

Possible causes

Are the cables of the operation panel connected correctly?

Actions to take

Make sure that there are cables connecting the operation panel and the control board, and restart the equipment.
Origin search (OP Return) fails.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
Equipment rear panel: F3 fuse (DRIVE)             

Problems related to frame indexing

The Y and Z-axis motors of the lead frame loader do not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the Y and Z-axis motors connected correctly?

Actions to take

Make sure that the cables between the Y and Z-axis motors and the control board are connected correctly.     

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
BP X2 board section F1 to F8 fuses

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The Z-axis motor of the frame stacker does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the Z-axis motor connected correctly?

Actions to take

Make sure that the cables between the Z-axis motor and the control board are connected correctly.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
BP X2 board section F1 to F8 fuses

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The frame indexing left (right) stage motor of the indexer does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the frame indexing left (right) stage motor connected correctly?

Actions to take

Make sure that the cables between the frame indexing left (right) stage motor and the control board are connected correctly.

Possible causes

Are the cables of the linear sensor for positional detection connected correctly?

Actions to take

Make sure that the cables between the linear scale and the control board are connected correctly.
The indexer left (right) pincher motor does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the left (right) pin motor connected correctly?

Actions to take

Make sure that the cables between the left (right) pin motor and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
BP X1 board section F1 to F8 fuses                   
The out-pusher motor of the indexer does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the out-pusher motor connected correctly?

Actions to take

Make sure that the cables between the out-pusher motor and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
BP X1 board section F1 to F8 fuses             
The lead clamper of the indexer does not operate. Origin search (OP Return) fails.

Possible causes

Are the cables of the lead frame clamper motor connected correctly?

Actions to take

Make sure that the cables between the lead clamper motor and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
BP X1 board section F1 to F8 fuses      
The heater temperature of the indexer does not increase.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse of each heater. If any have blown, replace it with a new one.
Equipment rear panel
F7 250V 5A HEATER1
F8 250V 5A HEATER2
F9 250V 5A HEATER3
F10 250V 5A HEATER4                  

Possible causes

Are the heater or CA line (thermocouple) cables connected correctly?

Actions to take

Make sure that the cables between the heater or CA line and the control board are connected correctly.

Possible causes

Has the CA line (thermocouple) failed?

Actions to take

If the heater is set to the normal temperature (approximately 25°C), the cables are connected correctly, and the temperature display is abnormal, the CA line may have failed.
Replace the CA line.

Possible causes

Has the cartridge heater failed?

Actions to take

If the heater is set to approximately 50°C, the cables are connected correctly,
and the display temperature does not increase, the cartridge heater may have failed.
Replace the cartridge heater.
The Y-axis motor for frame detection does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the Y-axis motor for frame detection connected correctly?

Actions to take

Make sure that the cables between the Y-axis motor for frame detection and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The belt motor of the unloader stocker does not rotate.

Possible causes

Are the cables of the belt motor connected correctly?

Actions to take

Make sure that the cables between the belt motor and the control board are connected correctly.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
UL X1 board section F1, F2, F3, F5 fuses
The Y and Z-axis motors of the unloader stocker do not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the Y and Z-axis motors connected correctly?

Actions to take

Make sure that the cables between the Y and Z-axis motors and the control board are connected correctly.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
UL X1 board section F1, F2, F3, F7, F8 fuses

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The magazine clamp of the unloader stocker does not operate.

Possible causes

Are the cables of the magazine clamp motor connected correctly?

Actions to take

Make sure that the cables between the magazine clamp motor and the control board are connected correctly.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
UL X1 board section F1, F2, F3, F6 fuses

Problems related to wafer transport and pickup

The X and Y-axis motors do not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the X and Y-axis motors connected correctly?

Actions to take

Make sure that the cables between the X and Y-axis motors and the control board are connected correctly.

Possible causes

Has the fuse blown?

Actions to take

Check the fuse. If it has blown, replace it with a new one.
JU section F21 (Y-axis), F22 (X-axis) fuse

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The Z-axis motor of the plunge-up part does not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the Z-axis motor connected correctly?

Actions to take

Make sure that the cables between the Z-axis motor and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The plunge-up unit does not operate vertically.

Possible causes

Are the cables of the solenoid valve for vertical movement connected correctly?

Actions to take

Make sure that the cables between the solenoid valve and the control board are connected correctly.

Possible causes

Has the solenoid valve for vertical movement failed?

Actions to take

If the operation fails although cables are connected correctly, the solenoid valve may have failed. Replace the solenoid valve.

Possible causes

Are the air and vacuum pipes corrected correctly?

Actions to take

Check whether the air and vacuum pipes are disconnected. If any are disconnected, replace them.
The suction and blow of the suction stage are unstable.

Possible causes

Are the cables of the solenoid valve for suction connected correctly?

Actions to take

Make sure that the cables between the solenoid valve and the control board are connected correctly. 

Possible causes

Has the solenoid valve for suction failed?

Actions to take

If the operation is unstable although cables are connected correctly, the solenoid valve may have failed. Replace the solenoid valve.

Possible causes

Are the air and vacuum pipes corrected correctly?

Actions to take

Check whether the air and vacuum pipes are disconnected. If any are damaged, replace them.

Possible causes

Is the suction stage contaminated? 

Actions to take

Clean it by reading and following the relevant information in the Instruction Manual.

Problems related to bonding head

The X, Y, Z, and θ-axis motors do not rotate. Origin search (OP Return) fails.

Possible causes

Are the cables of the X, Y, Z, and θ-axis motors connected correctly?

Actions to take

Make sure that the cables between the X, Y, Z, and θ-axis motors and the control board are connected correctly.

Possible causes

Has the origin sensor failed?

Actions to take

Check the signal transmission by I/O checking. If it has failed, replace it.
The touch detect sensor does not operate normally.

Possible causes

Are the cables of the detect sensor connected correctly?

Actions to take

Make sure that the cables between the touch detect sensor and the control board are connected correctly.

Possible causes

Is the detect sensor installed in the correct position?

Actions to take

Readjust the sensor position by reading and following the relevant information in the Instruction Manual.
The die detect sensor does not operate normally.

Possible causes

Are the cables of the detect sensor connected correctly?

Actions to take

Make sure that the cables between the die detect sensor and the control board are connected correctly.

Possible causes

Has the sensitivity of the detect sensor been adjusted correctly?

Actions to take

Readjust the sensitivity of the detect sensor by reading and following the relevant information in the Instruction Manual.

プロセス編

Processes

Pickup problems

Dies cannot be picked up from the wafer.

Possible causes

Mechanical adjustment of the collet, plunge-up pin, and suction stage may not be appropriate.

Actions to take

Adjust the planarity of the collet.
Adjust the plunge-up pin height.
Adjust the position so that the suction stage matches the center of the collet.

Possible causes

Are the plunge-up unit and the collet contaminated?

Actions to take

Replace the plunge-up pin.
Replace the collet. 

Possible causes

The pickup parameters may not be appropriate.

Actions to take

Adjust the plunge-up speed.
Adjust the plunge-up stroke of the plunge-up pin.
Adjust the pickup force.
Increase the set value of the pickup sink level.
Register the pickup Z-level again.

Possible causes

Has the vacuum pressure for factory power fallen?

Actions to take

Adjust the vacuum pressure to the specified level.
The die surface is scratched.

Possible causes

Is the collet contaminated?

Actions to take

Replace the collet.

Possible causes

The bond force setting may not be appropriate.

Actions to take

Adjust the load.
Die cracking/chipping occurs.

Possible causes

Mechanical adjustment of the collet, plunge-up pin, and suction stage may not be appropriate.

Actions to take

Adjust the planarity of the collet.
Adjust the plunge-up pin height.
Adjust the position so that the suction stage matches the center of the collet.

Possible causes

Are the plunge-up unit and the collet contaminated?

Actions to take

Replace the plunge-up pin.
Replace the collet.

Possible causes

The pickup parameters may not be appropriate.

Actions to take

Adjust the plunge-up speed.
Register the pickup Z-level again.
Adjust the force.

Problems related to bonding

Dies cannot be bonded on lead frames.

Possible causes

Is the collet contaminated?

Actions to take

Replace the collet.

Possible causes

The bonding parameters may not be appropriate.

Actions to take

Register the bonding Z-level again.
Increase the set value of the bonding sink level.
Increase the indexer set temperature.
Check the die thickness, and enter an appropriate value.

Possible causes

Has the frame oxidized?

Actions to take

Check the input of forming gas.
Adjust the flow rate of forming gas.
Check the connections of forming gas pipes.
If any forming gas pipes are damaged, replace them.
Theta deviation occurs.

Possible causes

Is the collet contaminated?

Actions to take

Replace the collet. 

Possible causes

Mechanical adjustment of the collet, plunge-up needle, and suction stage may not be appropriate.

Actions to take

Adjust the plunge-up pin height.
Adjust the position so that the suction stage matches the center of the collet.

Possible causes

Has the vacuum pressure for factory power fallen?

Actions to take

Adjust the vacuum pressure to the specified level.

Possible causes

The bonding parameters may not be appropriate.

Actions to take

Adjust the plunge-up speed.
Register the bonding Z-level again.
Increase the set value of the pickup sink level.
Adjust the force.
Check the die thickness, and enter an appropriate value.
Positional deviation occurs.

Possible causes

Is the collet contaminated?

Actions to take

Replace the collet. 

Possible causes

Mechanical adjustment of the collet, plunge-up needle, and suction stage may not be appropriate.

Actions to take

Adjust the planarity of the collet.
Adjust the plunge-up pin height.
Adjust the position so that the suction stage matches the center of the collet.

Possible causes

The bonding parameters may not be appropriate.

Actions to take

Register the pickup/bonding Z-level again.
Increase the set value of the pickup sink level.
Adjust the force.
Check the die thickness, and enter an appropriate value.
Adjust the time before die detection.
Adjust the time before frame detection.

Possible causes

Detection may not be appropriate.

Actions to take

Register the chip detection model again.
Register the frame detection model again.    
Bond tilt occurs.

Possible causes

Mechanical adjustment of the collet, plunge-up needle, and suction stage may not be appropriate.

Actions to take

Adjust the planarity of the collet.
Adjust the position so that the suction stage matches the center of the collet.
If the heater has irregularities (such as concave or convex portion), make sure that the indexing position of the frame is correct. If not, adjust the indexing position.

Possible causes

Is the collet contaminated?

Actions to take

Clean or replace the collet.

Possible causes

Has the vacuum pressure for factory power fallen?

Actions to take

Adjust the vacuum pressure to the specified level.

Possible causes

The bonding parameters may not be appropriate.

Actions to take

Register the bonding Z-level again.
Adjust the load.
Wettability is insufficient.

Possible causes

The bonding parameters may not be appropriate.

Actions to take

Increase the indexer set temperature.
Adjust the ON time of the vacuum release blow of the collet.
Adjust the vacuum OFF height of the collet.
Increase the bonding time set value.
Adjust the force by increasing it.
Increase the set value of the bonding sink level.
Check the die thickness, and enter an appropriate value.
Register the bonding Z-level again.

Possible causes

Has the frame oxidized?

Actions to take

Check the input of forming gas.
Increase the flow rate of forming gas.
Check the connections of forming gas pipes.
If any forming gas pipes are damaged, replace them.

Problems related to indexing

The lead frame oxidizes.

Possible causes

Is the flow rate of mixed gas insufficient?

Actions to take

Increase the flow rate of forming gas.

Possible causes

Are there problems concerning the connections of mixed gas pipes, or are pipes damaged?

Actions to take

Check the pipe connections.
If any pipes are damaged, replace them.
The lead frame is scratched.

Possible causes

Mechanical adjustment of the indexer unit may not be appropriate.

Actions to take

Adjust the lead frame clamper position.
Clean the lead frame clamper.
Make sure that the loader/unloader section is parallel to the frame indexing rail position.
If it is not parallel, adjust the position.
Check the parallelism and height of the index pin and frame indexing rail.
If they are not in the appropriate positions, adjust them.
Remove the gas lid, and check for interference.
If there is interference, adjust the position of the gas lid.
An overload error occurs frequently.

Possible causes

The threshold of the overload sensor may not be appropriate.

Actions to take

Adjust the sensitivity of the overload sensor again.

Possible causes

Is the frame indexing rail contaminated?

Actions to take

Clean the frame indexing rail.
Indexing accuracy is insufficient.

Possible causes

Is the frame indexing rail contaminated?

Actions to take

Clean the frame indexing rail.

Possible causes

The position of the transfer gripper may not be appropriate with respect to the frame indexing hole.

Actions to take

Check the position of the index pin and frame indexing hole. If they do not match, adjust the position of the index pin.

Possible causes

Is the index speed too high?

Actions to take

Reduce the index speed.

コンテンツ